| 声表面波瓦斯传感器高压电薄膜研究 |
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| 引用本文： | 张涛,马宏伟,赵省贵.声表面波瓦斯传感器高压电薄膜研究[J].西安科技大学学报,2011,31(2). |
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| 作者姓名： | 张涛 马宏伟 赵省贵 |
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| 作者单位： | 1. 西安科技大学,理学院,陕西,西安,710054
2. 西安科技大学,机械学院,陕西,西安,710054 |
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| 基金项目： | 国家自然科学基金项目，陕西省自然科学基金项目，博士后基金面上项目，教育部博士点基金项目 |
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| 摘 要： | 我国煤矿瓦斯事故频发,造成大量人员伤亡和国有资源流失.声表面波瓦斯传感器体积小、工作稳定,能够有效提高煤矿瓦斯监、检能力,减少瓦斯事故.声表面波瓦斯传感器的灵敏度主要取决于压电薄膜的压电系数及机械品质因数,因而高压电系数、高机械品质因数的压电薄膜对于制备高性能声表面波瓦斯传感器具有重要意义.文中通过磁控溅射法沉积PMnN-PZT三元系铁电薄膜,所得薄膜具有高压电性及较高的机械品质因数,有望应用于声表面波瓦斯传感器制备.
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| 关 键 词： | 声表面波 瓦斯传感器 压电薄膜 |
High piezoelectricity thin film of surface acoustic wave(SAW)sensor for methane |
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| ZHANG Tao,MA Hong-wei,ZHAO Sheng-gui.High piezoelectricity thin film of surface acoustic wave(SAW)sensor for methane[J].JOurnal of XI’an University of Science and Technology,2011,31(2). |
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| Authors: | ZHANG Tao MA Hong-wei ZHAO Sheng-gui |
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| Affiliation: | ZHANG Tao1,MA Hong-wei2,ZHAO Sheng-gui1(1.College of Sciences,Xi'an University of Science and Technology,Xi'an 710054,China,2.College of Mechanical Engineering,China) |
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| Abstract: | The methane accidents frequently occur in coal mines of China,and many people were injured or killed,and national assets were lost.Surface acoustic wave sensors for methane are so small,stable that they can effectly improve the conditions of coal mines.The sensitivity of SAW methane sensors depend mostly on the piezoelectricity and the mechanical quality of piezoelectric thin films,and so high piezoelectric thin films with high quality factor are very important for SAW methane sensors.In this research,the P... |
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| Keywords: | PMnN-PZT |
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