| 基于Petri网的分层半导体制造过程调度结构 |
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| 引用本文： | 乔非,李莉,陈康民,黄丹.基于Petri网的分层半导体制造过程调度结构[J].同济大学学报(自然科学版),2006,34(11):1551-1555. |
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| 作者姓名： | 乔非 李莉 陈康民 黄丹 |
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| 作者单位： | 1. 同济大学,CIMS研究中心,上海,200092
2. 上海贝岭股份有限公司,上海,200233 |
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| 基金项目： | 国家自然科学基金;国家重点基础研究发展计划(973计划) |
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| 摘 要： | 针对复杂的半导体制造过程调度，在综述现有调度问题及方法的基础上，提出由投料调度、路径调度和两种类型的工件调度共同组成的分层调度结构的思想及方案，继而基于Petri订网模型，探讨所提出的分层半导体调度结构基于Petri网模型的实现方法，最后通过仿真对分层调度结构加以应用验证，并总结全文．
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| 关 键 词： | 半导体制造 调度结构 Petri网 分层的 |
| 文章编号： | 0253-374X（2006）11-1551-05 |
| 收稿时间： | 04 21 2005 12:00AM |
| 修稿时间： | 2005-04-21 |
Research on Petri Net Based Hierarchical Scheduling Structure for Semiconductor Manufacture Process |
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| QIAO Fei,LI Li,CHEN Kangmin,HUANG Dan.Research on Petri Net Based Hierarchical Scheduling Structure for Semiconductor Manufacture Process[J].Journal of Tongji University(Natural Science),2006,34(11):1551-1555. |
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| Authors: | QIAO Fei LI Li CHEN Kangmin HUANG Dan |
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| Affiliation: | 1. CIMS Research Center, Tongii University, Shanghai 200092, China; 2, Shanghai Belling Ltd. Co., Shanghai 200233, China |
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| Abstract: | Based on an analysis of the complex semiconductor manufacturing process scheduling, the existing scheduling sub-problems and their algorithms are summarized. Then, a hierarchical scheduling structure for the semiconductor manufacture process, which consists of release scheduling, routing scheduling and two kinds of lots scheduling, is suggested and designed. With reference to the hierar- chical Petri net based semiconductor production model, the Petri net based presentation and implemen- tation of the proposed hierarchical scheduling structure are further explored. At last, the hierarchical scheduling structure and its implementation method are applied and veritied with a simulation case. |
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| Keywords: | semiconductor manufacturing scheduling structure Petri net hierarchical |
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