| 微结构运动特性表征中的全场三维重建方法 |
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| 引用本文： | 郭彤,胡春光,胡晓东,栗大超,傅星,胡小唐.微结构运动特性表征中的全场三维重建方法[J].光电工程,2006,33(9):75-79. |
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| 作者姓名： | 郭彤 胡春光 胡晓东 栗大超 傅星 胡小唐 |
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| 作者单位： | 天津大学,精密测试技术及仪器国家重点实验室,天津,300072 |
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| 基金项目： | 中国博士后科学基金;国家重点实验室基金 |
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| 摘 要： | 微机电系统(MEMS)测试的主要目的是为工程开发中的设计和模拟过程提供数据反馈,其中一个重要方面就是MEMS器件运动特性的高速可视化。基于计算机控制的频闪干涉测试系统,文中提出了一种时间轴和空间轴双向解包裹的干涉条纹分析方法,实现了MEMS器件离面运动参数的精确测量,并与微结构平面结构图像模板相结合,可以进行MEMS器件全视场运动的分析,达到了纳米级分辨力。
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| 关 键 词： | 微机电系统 微谐振器 动态表征 模板 三维重建 |
| 文章编号： | 1003-501X(2006)09-0075-05 |
| 收稿时间： | 2006-01-08 |
| 修稿时间： | 2006-04-17 |
Full field 3D rebuilding method in dynamic MEMS characterization |
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| GUO Tong,HU Chun-guang,HU Xiao-dong,LI Da-chao,FU Xing,HU Xiao-tang.Full field 3D rebuilding method in dynamic MEMS characterization[J].Opto-Electronic Engineering,2006,33(9):75-79. |
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| Authors: | GUO Tong HU Chun-guang HU Xiao-dong LI Da-chao FU Xing HU Xiao-tang |
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| Affiliation: | State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China |
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| Abstract: | A key purpose for testing Microelectromechanical systems (MEMS) is to provide data feedback of measurements to the design and simulation in the process of development, where high-speed visualization of dynamic properties of MEMS devices is a very important aspect. This paper describes a computer-controlled stroboscopic interferometer system for measuring out-of-plane motions of MEMS structures with nanometer resolution. In the out-of-plane motion measurement of MEMS, a two-direction phase-unwrapping method based on time axis and space axis is demonstrated. And the time and space information of MEMS motions are combined in favor of analyzing MEMS dynamic behaviors. In addition, 3D motions of MEMS devices can be measured by using the full field rebuilding technology based on mask. |
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| Keywords: | Microelectromechanical systems(MEMS) Micro-resonator Dynamic characterization Mask 3D rebuilding |
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