| 化学气相沉积制膜技术的应用与发展 |
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| 引用本文： | 王豫,水恒勇.化学气相沉积制膜技术的应用与发展[J].热处理,2001,16(4):1-4. |
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| 作者姓名： | 王豫 水恒勇 |
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| 作者单位： | 安徽工业大学冶金与材料学院, |
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| 摘 要： | 化学气相沉积作为一种有效的表面工程技术手段，发展十分迅速，应用范围日趋广泛。本文介绍了化学气相沉积制膜技术在国民经济各个领域中的应用及其发展趋势。
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| 关 键 词： | 化学气相沉积 薄膜 制膜技术 表面工程 |
| 文章编号： | 1008-1690(2001)04-0001-04 |
| 修稿时间： | 2001年7月17日 |
The Application and Development of Techniques of Film Making With Chemical Vapor Deposition |
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| WANG Yu,SHUI Heng-yong.The Application and Development of Techniques of Film Making With Chemical Vapor Deposition[J].Heat Treatment,2001,16(4):1-4. |
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| Authors: | WANG Yu SHUI Heng-yong |
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| Abstract: | As an effective surface engineering technology,the chemical vapor deposition has developed rapidly,and its application is becoming more and more wildly.The article has introduced the application and development tendency of techniques of film making with chemical vapor deposition in all fields. |
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| Keywords: | chemical vapor deposition thin film development |
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