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PZN-PT Single-Crystal Thin Film Monomorph Actuator |
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| Authors: | M Levy S Ghimire A K Bandyopadhyay Y K Hong K Moon S Bakhru H Bakhru |
| Affiliation: | a Physics Department, Michigan Technological University, Houghton, Michigan 49931, USA. b Department of Mechanical Engineering, Michigan Technological University, Houghton, Michigan 49931, USA. c Department of Physics, State University of New York at Albany, Albany, NY 12222, USA. |
| Abstract: | We report on the use of single-crystal lead zinc niobate-lead titanate films in monomorph actuators. The article responds to the growing interest in solid-solution (1 - x )Pb(Zn 1/3 Nb 2/3 )O 3 - x PbTiO 3 relaxor ferroelectrics based on their large piezoelectric coefficients and their integration into microelectromechanical system. Freestanding films are fabricated by slicing a 7 μm-thick layer off the crystal bulk and assembled into a flexural actuator, thus circumventing polycrystalline deposition techniques. One-micron deflections are observed at 100 V for ~1 mm-long films. The article discusses the non-uniform electric field distribution profile established in the films and its role in the actuation process. |
| Keywords: | Relaxors Ferroelectrics Pzn-PT Monomorph Unimorph Bimorph Actuators Piezoelectrics Mems |
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