首页 | 官方网站   微博 | 高级检索  
     


PZN-PT Single-Crystal Thin Film Monomorph Actuator
Authors:M. Levy   S. Ghimire  A. K. Bandyopadhyay  Y. K. Hong  K. Moon  S. Bakhru  H. Bakhru
Affiliation: a Physics Department, Michigan Technological University, Houghton, Michigan 49931, USA.b Department of Mechanical Engineering, Michigan Technological University, Houghton, Michigan 49931, USA.c Department of Physics, State University of New York at Albany, Albany, NY 12222, USA.
Abstract:
We report on the use of single-crystal lead zinc niobate-lead titanate films in monomorph actuators. The article responds to the growing interest in solid-solution (1 - x )Pb(Zn 1/3 Nb 2/3 )O 3 - x PbTiO 3 relaxor ferroelectrics based on their large piezoelectric coefficients and their integration into microelectromechanical system. Freestanding films are fabricated by slicing a 7 μm-thick layer off the crystal bulk and assembled into a flexural actuator, thus circumventing polycrystalline deposition techniques. One-micron deflections are observed at 100 V for ~1 mm-long films. The article discusses the non-uniform electric field distribution profile established in the films and its role in the actuation process.
Keywords:Relaxors  Ferroelectrics  Pzn-PT  Monomorph  Unimorph  Bimorph  Actuators  Piezoelectrics  Mems
本文献已被 InformaWorld 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司    京ICP备09084417号

京公网安备 11010802026262号