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快速傅里叶变换与泽尼克模式拟合的条纹投影面形恢复算法
引用本文:刘江,崔穆涵,高松涛,隋永新,杨怀江.快速傅里叶变换与泽尼克模式拟合的条纹投影面形恢复算法[J].应用光学,2013,34(4):614-618.
作者姓名:刘江  崔穆涵  高松涛  隋永新  杨怀江
作者单位:1.中国科学院 长春光学精密机械与物理研究所 应用光学国家重点实验室,吉林 长春 130033; 2.中国科学院大学,北京 100049
基金项目:国家科技重大专项(02专项)资助课题
摘    要: 针对条纹投影偏折法中需要多次迭代进行面形恢复,提出一种结合快速傅里叶变换(FFT)算法与泽尼克(Zernike)模式拟合的算法(FFT-尼克)。数值仿真结果表明,直接使用泽尼克模式拟合,需要迭代15次,用时1 min以上,而使用FFT-尼克算法,迭代5次已收敛到理想精度。在保证计算精度在纳米量级的情况下,计算时间也缩短了近2/3。

关 键 词:光学检测  FFT-尼克模式拟合算法  模式拟合算法  Southwell区域算法  条纹投影偏折法

FFT-Zernike combined algorithm of wavefront reconstruction in measurement of optical surfaces based on projected fringes deflectometry
LIU Jiang , CUI Mu-han , GAO Song-tao , SUI Yong-xin , YANG Huai-jiang.FFT-Zernike combined algorithm of wavefront reconstruction in measurement of optical surfaces based on projected fringes deflectometry[J].Journal of Applied Optics,2013,34(4):614-618.
Authors:LIU Jiang  CUI Mu-han  GAO Song-tao  SUI Yong-xin  YANG Huai-jiang
Affiliation:1.State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, CAS,
Changchun 130033, China; 2. University of Chinese Academy of Sciences, Beijing 100049, China
Abstract:The basic principle of projected fringes deflectometry is to measure the point-o-oint relations of coordinates among free-orm surface, camera and projection screen, and then compute the reconstructed surface with calculated slope data iteratively. In order to reduce the calculating time of the wavefront reconstruction without losing accuracy, a fast Fourier transform(FFT) Zernike combined algorithm was proposed. The simulated result demonstrates the proposed algorithm can decrease the iterative procedure to 5 times using less than 20 seconds, compared with the traditional Zernike modal algorithm which has 15 iteration times using more than 1 minute. In addition, the calculating time is cut by two-hirds with the accuracy achieving the order of nanometer.
Keywords:optical test  combined FFT-Zernike modal method  modal method  Southwell zonal method  projected fringes deflectometry
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