Research on the control systems of a precision linear motor drive device |
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Authors: | Yan Han Wang Xian-kui and Duan Guang-hong |
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Affiliation: | (1) Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, China |
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Abstract: | The model of a precision linear motor drive device (PLMDD) and its control requirements are analyzed. In order to enhance
the tracking and anti-disturbance performance of the system, its third-order model is established, and disturbance-observer
based input revising feedforward error compensation robust control algorithm, combined with integral-separated proportional
integral derivative (PID) control algorithm is proposed. This includes feedback control algorithm and feedforward control
algorithm. The feedback controller improves system tracking performance and suppresses load and mechanical disturbance while
the feedforward controller compensates phase hysteresis introduced by feedback control. Theoretical analyses, simulations
and experiments show that this control method increases the tracking precision of PLMDD from ±5 μm to ±2 μm and dramatically
improves its anti-disturbance ability. |
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Keywords: | precision linear motor drive disturbance observer input revising feedforward error compensation |
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