| UV-LIGA和微细电火花加工技术组合制作三维金属微结构的研究 |
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| 引用本文： | 杜立群.UV-LIGA和微细电火花加工技术组合制作三维金属微结构的研究[J].光学精密工程,2010,18(2):363-368. |
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| 作者姓名： | 杜立群 |
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| 作者单位： | 大连理工大学机械学院微系统中心 |
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| 摘 要： | 研究了UV-LIGA和微细电火花加工技术组合制作三维金属微结构的工艺方法。首先通过UV-LIGA制作二维金属微结构，再对该微结构进行微细电火花加工得到三维金属微结构。该方法具有加工精度高、可实现自由曲面三维金属微结构制作的优点。制作出了局部为梯形凸台和锥形凹槽三维微结构的镍模具。分析了微细电火花加工中放电参数对表面粗糙度的影响，通过减小放电电压和电容的方法降低了表面粗糙度。
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| 关 键 词： | 三维金属微结构 UV-LIGA 微细电火花加工 表面粗糙度 |
| 收稿时间： | 2009-07-15 |
| 修稿时间： | 2009-10-27 |
Research on fabrication of 3D metal microstructure based on UV-LIGA and micro-EDM technology |
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| Abstract: | A process to fabricate 3D metal microstructure based on UV-LIGA and micro-EDM technology was researched. 2D metal microstructure was fabricated by UV-LIGA technology firstly, and then it was machined using micro-EDM to get 3D metal microstructure. The method takes advantages of high machining accuracy and fabricating 3D metal microstructure with free-form surfaces. 3D nickel mold with trapezium table and taper flute microstructures in part was fabricated. The influence of micro-EDM discharge parameter on surface roughness was analyzed, and the surface roughness was dropped through reducing the discharge voltage and catacitance. |
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| Keywords: | 3D metal microstructure UV-LIGA micro-EDM surface roughness |
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