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双光纤-悬臂梁FBG加速度传感器研究
引用本文:李立新,王业伟,左浩宙,邱忠超,洪利. 双光纤-悬臂梁FBG加速度传感器研究[J]. 半导体光电, 2022, 43(1): 126-131. DOI: 10.16818/j.issn1001-5868.2021102101
作者姓名:李立新  王业伟  左浩宙  邱忠超  洪利
作者单位:防灾科技学院电子科学与控制工程学院,河北三河065201;河北省地震灾害仪器与监测技术重点实验室,河北三河065201
基金项目:廊坊市科学技术研究与发展计划自筹经费项目(2021011033);中央高校基本科研业务费资助计划项目(2021011033);中央高校基本科研业务费研究生科技创新基金项目(ZY20210304).*通信作者:王业伟E-mail:w_emu_cidp@163.com
摘    要:针对现有悬臂梁FBG加速度传感器光纤表面粘贴会造成FBG受力不均匀,并且无法在温度变化和振动等复杂的环境中工作的问题,提出一种双光纤-悬臂梁结构的FBG加速度传感器。理论分析了结构参数对传感器灵敏度和固有频率的影响,并采用ANSYS有限元分析软件进行了静应力和模态仿真分析,最后搭建了测试系统对传感器进行性能测试。结果表明,加速度传感器的固有频率为84.86Hz,在15~60Hz的低频段具有平坦的灵敏度响应,双光纤在增加传感器的灵敏度的同时有效消除了温度变化的影响,加速度灵敏度为156.70pm/g,线性度为99.38%,刚性梁有效增加了结构的稳定性,在工作频段内的横向串扰为-26.97dB。

关 键 词:光纤布拉格光栅  加速度传感器  悬臂梁  有限元分析
收稿时间:2021-10-21

Research on Double Fiber-cantilever Beam FBG Acceleration Sensor
LI Lixin,WANG Yewei,ZUO Haozhou,QIU Zhongchao,HONG Li. Research on Double Fiber-cantilever Beam FBG Acceleration Sensor[J]. Semiconductor Optoelectronics, 2022, 43(1): 126-131. DOI: 10.16818/j.issn1001-5868.2021102101
Authors:LI Lixin  WANG Yewei  ZUO Haozhou  QIU Zhongchao  HONG Li
Affiliation:School of Electronic Science and Control Engineering, Institute of Disaster Prevention, Sanhe 065201, CHN;Hebei Key Laboratory of Seismic Disaster Instrument and Monitoring Technology, Sanhe 065201, CHN
Abstract:The existing cantilever FBG acceleration sensor can be subjected to uneven force due to the optical fiber surface adhesion, and can not work in the complex environment of temperature change and vibration. In order to solve such problems, a dual fiber-cantilever structure FBG acceleration sensor is proposed. The influence of structural parameters on the sensitivity and natural frequency of the sensor was analyzed theoretically, and the static stress and modal simulation analysis was carried out by ANSYS finite element analysis software. Finally, a test system was built to test the performance of the sensor. The results show that the natural frequency of the acceleration sensor is 84.86Hz, and it has a flat sensitivity response in the low frequency range of 15~60Hz. The dual optical fiber can effectively eliminate the influence of temperature changes while increasing the sensitivity of the sensor, obtaining the acceleration sensitivity of 156.70pm/g and the linearity of 99.38%. The rigid beam effectively increases the stability of the structure, and the lateral crosstalk within the working frequency band is -26.97dB.
Keywords:fiber Bragg grating (FBG)   acceleration sensor   cantilever beam   finite element analysis
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