一种新的电子散斑微小振动测量系统

给出了一种新的电子散斑微小振动的振幅和相位测量系统，该系统将光学相移器和正弦相位调制器置于参考光路中，因而当被测物体改变时，系统勿需重新标定。采用高精度低压压电陶瓷作为光学相移器和正弦相位调制器，易于实现计算机直接控制，使系统具有很高的抗干扰能力。实验表明，该系统可以方便地对物体的微小振动（ 振幅小于３０ ｎｍ） 进行定量分析。

A novel system for measuring small vibration by ESPI

A novel measurement system of small vibration by electronic speckle pattern interferometry(ESPI) is presented in this paper. As the optical phase-shifter and the sinusoidal phase modulator are placed in the reference beam path simultaneously, the system needn't to be calibrated again if the object to be measured is changed. A high precision low voltage phase-shifter is used as an optical phase-shifter and a sinusoidal phase modulator, which can be controlled directly by the computer,making the system capable of performing powerful anti-interference. The results of measurement indicate that the amplitude and phase of small vibration (vibration amplitude is less than 30 nm) can be measured conveniently by this system.