轴对称非球面平行磨削Y轴向对刀误差补偿

在光学系统中应用非球面光学元件能够提高光学系统设计灵活性,改善光学系统成像质量,缩小光学系统尺寸,在整体上减轻系统质量。本文通过系统分析轴对称非球面元件精密磨削工艺过程中的轴向对刀误差等加工误差因素,建立轴向对刀误差校正方法,并将其运用到轴对称非球面精密磨削与抛光加工过程中。由实验可知：通过误差补偿,加工时间节省60%以上,Φ80mm口径非球面抛光后的面形精度PV值为0.62μm（0.982λ）,RMS值达到0.093μm（0.147λ）,满足非球面面形精度要求。实验结果验证了理论分析与误差补偿方法的正确性,实现了轴对称非球面光学元件的快速精密加工。

Analysis in Y Direction Reamer Error Based on Axisymmetric Aspheric Parallel Grinding

Aspheric components .could increase optical design flexibility, improve the image quality and optical properties and greatly decrease the size and weight of optical system.In this paper, through deeply analyzing the machining error factors, such as machining characteristics of axisymmetric aspheric precision grinding and tool-clamping error in technical process, the correction method of axial polishing.The experiments show that the and RMS 0.093bml （0.147X） could be ses and error compensation methods are ing can be realized. tool clamping error is established and applied in aspheric precision grinding and machining time decreases by 60%.The profile PV accuracy 0.62μm （0.982λ） achieved after 80 mm diameter aspherie surface polishing.The theoretical analyverified through the experiments, and the results show the rapid aspheric grinding can be realized.