射频磁控溅射技术制备羟基磷灰石生物涂层及其微结构

采用射频磁控溅射技术在Ti6Al4V基体上成功制备了羟基磷灰石(hydroxyapatite。HA)涂层，利用扫描电镜、X射线衍射、Fourie，红外光谱和电子探针线扫描对HA涂层的形貌、相组成和化学组成进行分析。结果表明：磁控溅射制备的涂层为非晶态且存在羟基的缺失，其Ca与P的摩尔比n(Ca)／n(P)为1．69．经大气条件下，后处理可恢复羟基并显着提高涂层的晶化程度。涂层与基体结合紧密，呈现有利于骨性结合的内部致密、表面多孔的梯度结构。

PREPARATION AND MICROSTRUCTURE OF HYDROXYAPATITE COATINGS DEPOSITED BY RADIO FREQUENCY MAGNETRON SPUTTERING

Hydroxyapatite (HA)was successfully deposited on Ti6Al4V substrate by radio frequency magnetron sputtering.Surface morphologies, phases and chemical compositions of HA coatings were analyzed with scanning electron microscopy (SEM), X-ray diffraction (XRD), and Fourier infrared absorption spectrometry (FTIR).The results show that the sputtered coatings are in amorphous state. Hydroxyls in hydroxyapatite have dissolved fully after sputtering.n(Ca)/n(P) of the coating is 1.69. After treatment under suitable atmospheric condition, hydroxyls in hydroxyapatite crystal can be recovered and crystallinities of hydroxyapatite coatings are obviously improved. A gradient structure with dense internal and porous in the surface is formed in the sputtered coating, which is very favorable to the growth of fresh osseous tissue.