利用计量型原子力显微镜进行纳米台阶高度测量

计量型原子力显微镜纳米测量系统主要由扫描器、测针位置传感器和一体化微型激光干涉三维测量系统等部分构成．针对计量型原子力显微测量系统，采用三维激光干涉测量系统作为测量基准，以实现原子力测量系统的纳米尺度量值溯源和校准工作．建立了校准模型，分析了扫描器9项主要误差项，并将该模型应用到原子力显微镜扫描器的校准中．校准后的结果表明，除z轴位置误差不超过±2nm外，其他8项的残余误差均不超过±1nm．通过台阶高度国际比对，建立了台阶高度标准计算方法及不确定度分析模型．台阶高度国际比对的测量结果表明，计量型原子力显微镜的测量值与参考值相差均小于1．5nm．

Step Height Measurement by the Metrological Atomic Force Microscope

The metrological atomic force microscope consists of the scanner, position sensor for cantilever and the inte- grated miniature three dimensional laser interferometric system.In this paper, the interferometric system was used as refer- ence standard to realize value traceability in nanoscale. The calibration model of scanner including 9 main error items of scanner was established and used in the calibration of scanner of atomic force microscope based on the measurement of inter- ferometer. The results show that the residual error of all other 8 items is no more than ＋ 1 nm, except that the position error in x direction is no more than ＋ 2 nm after calibration. The standard calculation method and the model of measurement uncertainty analysis for the step height measurement were built in the international comparison of step height standards. The comparison results of step height standards show that the difference between measuring value of the metrological atomic force microscope and reference value is smaller than 1.5 nm for each step height standard.