| 金刚石薄膜压力传感器的研究 |
| |
| 引用本文： | 杨保和,常明,杨晓萍.金刚石薄膜压力传感器的研究[J].材料导报,2000,14(8):71-74. |
| |
| 作者姓名： | 杨保和 常明 杨晓萍 |
| |
| 作者单位： | 天津理工学院光电系，天津理工学院光电系，天津理工学院光电系，天津理工学院光电系 天津 300191，天津 300191，天津 300191，天津 300191 |
| |
| 基金项目： | “金刚石薄膜压力传感器的研究”(编号:863-715-002-0060) |
| |
| 摘 要： | 金刚石的许多性质使它成为微结构为器件的优异材料。现已证明金刚石薄膜有压阻效应，这个性能打开了金刚石薄膜在压力传感器领域的应用，研究了金刚石薄膜的欧姆接触，热敏特性和压阻特性，研究表明金刚石薄膜可制成适于高温工作的传感器。
|
| 关 键 词： | 金刚石薄膜 压力传感器 压阻效应 半导体材料 |
Research on Diamond Film Pressure Sensor |
| |
| Yang Baohe Chang Ming Yang Xiaoping Wu Xiaoguo.Research on Diamond Film Pressure Sensor[J].Materials Review,2000,14(8):71-74. |
| |
| Authors: | Yang Baohe Chang Ming Yang Xiaoping Wu Xiaoguo |
| |
| Affiliation: | Tianjin Institute of Technology. Tianjin 300191 |
| |
| Abstract: | Many properties of diamond (e.g. its physical hardness, high Young's modulus, high tensile yield strength, chemical inertness, low coefficient of friction and high thermal conductivity) make it an excellent material for micromechanical device applications. It has been established that diamond films have piezoresistivity. This property enables diamond films to be used in the field of pressure sensor applications. This paper studies electrical characteristics of ohmic contacts and thermal-sensitive charactnstics and how resistance changes in response to pressure applied on diamond films. The results show that diamond films can be used to make sensors for high temperature. |
| |
| Keywords: | boron doped diamond film pressure sensor |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
