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A simple fabrication process for SiNx/SiO2 waveguide based on sidewall oxidation of patterned silicon substrate |
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| Authors: | Ya’nan Wang Bing Xiong Changzheng Sun Jian Wang Zhibiao Hao |
| Affiliation: | Tsinghua National Laboratory for Information Science and Technology/State Key Lab of Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua University, Beijing, P.R. China. |
| Abstract: | |
| Keywords: | Optical waveguide integrated optics patterned substrate thermal annealing |
