| 离子束辅助真空电弧沉积Zr-Ni-N薄膜的研究 |
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| 引用本文： | 吴健,胡社军,曾鹏,李宇恒,谢光荣.离子束辅助真空电弧沉积Zr-Ni-N薄膜的研究[J].工具技术,2006,40(12):15-17. |
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| 作者姓名： | 吴健 胡社军 曾鹏 李宇恒 谢光荣 |
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| 作者单位： | 广东工业大学材料与能源学院,510643,广州市;广东工业大学 |
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| 基金项目： | 国家自然科学基金
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广东省教育厅自然科学基金 |
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| 摘 要： | 采用多弧离子镀技术在高速钢和单晶硅基体上制备Zr-Ni-N复合薄膜,研究了低能氮离子束对Zr-Ni-N涂层结构、表面形貌和硬度的影响。研究表明:用低能氮离子束辅助真空电弧沉积Zr-Ni-N膜,ZrN结构在(111)晶面出现一定的择优取向,并对Zr-Ni-N膜层有一定的强化作用,膜层表现出较高的显微硬度。
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| 关 键 词： | 离子束 真空多弧离子镀 Zr-Ni-N薄膜 |
| 收稿时间： | 2006-03 |
| 修稿时间： | 2006-03 |
Investigation of Zr-Ni-N Film Prepared by VAD with Ion Beam Enhanced Deposition |
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| Wu Jian ,Hu Shejun ,Zeng Peng ,et al.Investigation of Zr-Ni-N Film Prepared by VAD with Ion Beam Enhanced Deposition[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2006,40(12):15-17. |
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| Authors: | Wu Jian Hu Shejun Zeng Peng |
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| Affiliation: | Wu Jian Hu Shejun Zeng Peng et al |
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| Abstract: | Zr-Ni-N coextruded film is deposited on high speed steel and single crystal silicon slice by using vacuum arc deposition technique. The influences of low energy nitrogen ion beam aid deposition on coating structure,morphology and hardness of Zr-Ni-N film are studied. The results show that bombarding to Zu-Ni-N film with low energy ion beam, ZrN phase with (111) preferential orientation can be formed and strengthened Zr-Ni-N film and the microhardness of the film is increased. |
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| Keywords: | Ion beam vacuum arc deposition (VAD) Zr-Ni-N film |
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