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基于555多谐振荡器检测的碳纳米管湿敏传感器
引用本文:赵振刚,刘晓为,王鑫,金海燕,谭晓昀.基于555多谐振荡器检测的碳纳米管湿敏传感器[J].光学精密工程,2011,19(1):118-123.
作者姓名:赵振刚  刘晓为  王鑫  金海燕  谭晓昀
作者单位:1. 哈尔滨工业大学,MEMS中心,黑龙江,哈尔滨,150001
2. 哈尔滨工业大学,MEMS中心,黑龙江,哈尔滨,150001;哈尔滨工业大学,微系统与微结构加工教育部重点实验室,黑龙江,哈尔滨,150001
基金项目:国家自然科学基金资助项目(No.60776049)
摘    要:针对使用仪器检测电容型碳纳米管湿度传感器的电容信号不利于传感器的使用与推广问题,提出了一种基于555多谐振荡式电路检测的电容型碳纳米管湿度传感器.首先,分析了传感器工作原理以及检测电路的检测原理,设计并制作了电容型碳纳米管湿度传感器;然后,分别使用仪器及检测电路对传感器进行测试;最后,对传感器响应时间进行了测试与分析....

关 键 词:碳纳米管  湿度传感器  多谐振荡器  频率输出
收稿时间:2010-03-17
修稿时间:2010-06-02

Carbon nanotube sensors based on 555 multivibrators
ZHAO Zhen-gang,LIU Xiao-wei,WANG Xin,JIN Hai-yan,TAN Xiao-yun.Carbon nanotube sensors based on 555 multivibrators[J].Optics and Precision Engineering,2011,19(1):118-123.
Authors:ZHAO Zhen-gang  LIU Xiao-wei  WANG Xin  JIN Hai-yan  TAN Xiao-yun
Affiliation:1. MEMS center, Harbin Institute of Technology, Harbin 150001, China;; 2. Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology,Harbin 150001, China
Abstract:The capacitive signals of capacitive carbon nanotube humidity sensors are usually tested by measuring instruments, which restricts the uses and developments of the sensors seriously. Focusing on this problem,one kind of capacitive carbon nanotube humidity sensor based on a 555 multivibrator was presented. Firstly, the principle of the sensor and the detecting circuit were discussed, and the sensor was designed and fabricated. Then, the sensor was tested by both the RCL apparatus and the proposed circuit, respectively. Finally, the response and recovery time of the sensor was tested. The testing results demonstrate that when the Relative Humidities (RH) surrounding the sensor change from 11% to 97%, the capacitive sensitivity and the output frequency sensitivity of the sensor are 905% and 889%,respectively. The frequency sensitivity is closed to the capacitive sensitivity, which means the circuit can well change capacitive signals to frequency signals.Furthermore, the adesorption and desorption time of the sensor is about 4 s and 18 s, respectively,which shows the sensor can offer low power consumption and fast response and has potential application prospects.
Keywords:carbon nanotube  humidity sensor  multivibrator  frequency output
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