| 吸收性薄膜波导的参数测量 |
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| 引用本文： | 欧阳嘉,何华辉.吸收性薄膜波导的参数测量[J].压电与声光,1995,17(1):44-46. |
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| 作者姓名： | 欧阳嘉 何华辉 |
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| 作者单位： | 华中理工大学固体电子学系 |
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| 摘 要： | 介绍了一种用棱镜耦合法测量吸收性薄膜波导参数的一种方法，它是由测得棱镜底部反射光斑中模的吸收线位置来确定薄膜的折射率和厚度。结果表明，此方法无需进行大量的计算就能同时精确地测量薄膜的折射率和厚度。给了两种吸收不同的薄膜波导参数测量结果。
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| 关 键 词： | 薄膜 波导 光吸收 参数测量 半导体薄膜 |
Parameter Measurement of Absorbing Thin Film Waveguide |
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| Ouyang Jia,He huahui.Parameter Measurement of Absorbing Thin Film Waveguide[J].Piezoelectrics & Acoustooptics,1995,17(1):44-46. |
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| Authors: | Ouyang Jia He huahui |
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| Abstract: | n this paper,a method for measuring the parameters of the absorbing thin film waveguide by prism coupling is introduced,which can determine the refractive index and thickness of waveguide by measuring the position of absorbing line of reflected light spot from prism. The method is of high precision and no complicated data computation is required.The measured results of two thin film waveguides with different absorption are given. |
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| Keywords: | film waveguide optical absorption parameter measurement |
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