| Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacitively Coupled Argon Discharges： One-Dimensional Fluid Simulation |
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| 引用本文： | 王帅,徐翔,宋远红,王友年.Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacitively Coupled Argon Discharges： One-Dimensional Fluid Simulation[J].等离子体科学和技术,2008,10(1):57-60. |
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| 作者姓名： | 王帅 徐翔 宋远红 王友年 |
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| 作者单位： | State Key Lab of Materials Modification by Beams, Department of Physics,Dalian University of Technology, Dalian 116024, China |
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| 基金项目： | supported by National Natural Science Foundation of China （No. 10635010） |
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| 摘 要： | A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail.
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| 关 键 词： | 耦合等离子体 对偶频率 水动力学 套管 |
| 收稿时间： | 2006-12-14 |
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