| 双通道声表面波转速传感器 |
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| 引用本文： | 严庆文,魏益群,李业隆,沈美娥,朱嘉林.双通道声表面波转速传感器[J].微纳电子技术,2007(Z1). |
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| 作者姓名： | 严庆文 魏益群 李业隆 沈美娥 朱嘉林 |
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| 作者单位： | 北京信息工程学院 北京100101(严庆文，魏益群，沈美娥，朱嘉林)，北京工商大学 北京100037(李业隆) |
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| 摘 要： | 以声表面波中的陀螺效应为理论基础,通过数值计算获得了LiNbO3基底上声表面波波速随基底转动速率的变化,以此为依据设计了一种双通道声表面波转速敏感结构,制作出双通道声表面波转速传感器。通过实验,该传感器的分辨率为12Hz/r.s-1。
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| 关 键 词： | 声表面波 陀螺效应 角速力传感器 |
Dual-Channel SAW Rotation Sensor |
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| YAN Qing-wen,WEI Yi-Qun,LI Ye-long,SHEN Mei-e,ZHU Jia-lin.Dual-Channel SAW Rotation Sensor[J].Micronanoelectronic Technology,2007(Z1). |
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| Authors: | YAN Qing-wen WEI Yi-Qun LI Ye-long SHEN Mei-e ZHU Jia-lin |
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| Affiliation: | YAN Qing-wen1,WEI Yi-Qun1,LI Ye-long2,SHEN Mei-e1,ZHU Jia-lin1 |
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| Abstract: | The relationship between surface acoustic wave(SAW) propagating velocity and the rotating velocity of the LiNbO3 substrate was obtained by calculating numerical value based on the SAW gyroscopic effect.A dual-channel delay line was designed according to the above calculation,and the SAW rotation sensor was developed.The resolution of the SAW rotation sensor is 12 Hz/r·s-1 through the experiment. |
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| Keywords: | SAW gyroscopic effect rotation sensor |
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