Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor |
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| Affiliation: | 1. Faculty of Engineering, Department of Precision Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan;2. Research Center for Advanced Science and Technology, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8904, Japan;1. Central Institute of Mental Health, Medical Faculty Mannheim/Heidelberg University, Heidelberg, Germany;2. Department of Psychiatry and Psychotherapy, University of Bonn, Bonn, Germany;3. Institute of Human Genetics, University of Bonn, Bonn, Germany;4. Department of Medical Informatics, University of Göttingen, Göttingen, Germany;5. Department of Psychiatry and Psychotherapy, Charité Berlin, Berlin, Germany;6. Department of Psychiatry and Psychotherapy, University of Hamburg, Hamburg, Germany;7. Department of Psychiatry and Psychotherapy, University of Düsseldorf, Düsseldorf, Germany;8. Department of Psychiatry and Psychotherapy, University of Freiburg, Freiburg, Germany;9. Department of Psychiatry and Psychotherapy, University of Leipzig, Leipzig, Germany;10. Department of Psychiatry and Psychotherapy, University of Heidelberg, Heidelberg, Germany;11. Département de Neurologie Institut de la Mémoire et de la Maladie d''Alzheimer, Université Pierre et Marie Curie, Hôpital de la Salpétriére Paris, France;12. Department of Psychiatry and Psychotherapy, University of Rostock, Rostock, Germany;13. German Center for Neurodegenerative Diseases (DZNE), Rostock, Germany;14. Institute of General Practice, University of Frankfurt, Frankfurt, Germany;15. Department of Psychiatry and Psychotherapy, University of Essen, Essen, Germany;p. Department of Psychiatry and Psychotherapy, University of Göttingen, Göttingen, Germany;q. Friedrich Alexander University of Erlangen-Nuremberg, Erlangen, Germany;r. German Center for Neurodegenerative Diseases, Bonn, Germany;1. Shanghai Key Laboratory of Contemporary Optics System, College of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, 200093 Shanghai, China;2. Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Zhangheng Road 1500, 201203 Shanghai, China;3. Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China;1. CERN, European Organization for Nuclear Research, CH-1211 Geneva 23, Switzerland;2. Laboratore de l’Accelerateur Lineaire (LAL), Universite Paris Sud Orsay, Orsay, France;3. INFN Sezione di Ferrara and departamento di Fisica e Scienze della Terra, Universita di Ferrara, Via Sarogat 1 Blocco C, 44121 Ferrara, Italy;4. INFN, LNF, Via Fermi, 40 00044 Frascati (Roma), Italy;5. INFN Sezione di Roma, Piazzale Aldo Moro 2, 00185 Rome, Italy;6. INFN Sezione di Napoli, Italy;7. NRC Kurchatov Institute – IHEP, 142281 Protvino, Russia;8. Joint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Russia;9. Petersburg Nuclear Physics Institute in National Research Centre “Kurchatov Institute”, 188300 Gatchina, Russia;10. Imperial College, London, United Kingdom |
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| Abstract: | With recent development in advanced manufacturing, demand for nanometric accuracy in dimensional metrology has increased dramatically. To satisfy these requirements, we propose a high-accuracy micro-roundness measuring machine (micro-RMM) using a multi-beam angle sensor (MBAS). The micro-RMM includes three main parts: the MBAS, a rotary unit, and a bearing system. The MBAS has been designed and established in order to improve motion accuracy of the micro-RMM. The dimensions of the MBAS are 125(L) mm × 130(W) mm × 90(H) mm. Compared with other methods, an MBAS is less susceptible to spindle error (stage-independence) when detecting angles, can maintain high sensitivity with miniaturized size, and can be used conveniently at the factory level. The optical probe, reported in this paper, is based on the principle of an autocollimator, and the stability is improved when using the MBAS. Unlike multi-probe methods, the micro-RMM is constructed to realize roundness measurement by using only one probe, which is less susceptible to instrumental errors. Experimental results confirming the feasibility of the multi-beam angle sensor for roundness measurement are also presented. |
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| Keywords: | Micro-RMM Multi-beam angle sensor Roundness Autocollimator Stage-independence |
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