| 白光相移干涉法测量三维表面轮廓的算法及实现 |
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| 引用本文： | 刘泊,强锡富.白光相移干涉法测量三维表面轮廓的算法及实现[J].哈尔滨理工大学学报,1999,4(3):95-99. |
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| 作者姓名： | 刘泊 强锡富 |
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| 作者单位： | [1]哈尔滨理工大学仪器仪表学院 [2]哈尔滨工业大学计算机与电气工程学院 |
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| 摘 要： | 依据白光干涉理论，利用相移干涉法，研究了三维表面轮廓测量的原理与系统构成，讨论了白光相移干涉法测量三维表面轮廓的算法和数据处理的实现过程，实验结果表明，测量结果和数据处理都可精确地满足被测工件的要求。
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| 关 键 词： | 相移干涉法 算法 白光干涉 表面轮廓 测量 |
3D Surface Profile Measurement Based on the Phase-shift Interfering Technique |
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| LIU Bo, ZHENG Wei, QIANG Xi-fu, JIANG Jian-feng.3D Surface Profile Measurement Based on the Phase-shift Interfering Technique[J].Journal of Harbin University of Science and Technology,1999,4(3):95-99. |
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| Authors: | LIU Bo ZHENG Wei QIANG Xi-fu JIANG Jian-feng |
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| Abstract: | The prindples of measurement and instrument of a kind of profiler are studied accordingto the white-light-interfering method, and adopting the phase-shift interfering technique. The method and technique for measuring 3D surface profile with computer sampling and processing data with high speed is discussed, which is proved to be very effective by experiments. |
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| Keywords: | white-light phase-shift interfering 3D surface profile three frames method five frames method |
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