高性能智能窗用掺钨二氧化钒膜系的研制

针对智能窗用的二氧化钒膜系需相变温度接近室温、红外调节率高、可见光透过率高等实际问题,通过薄膜设计(Coating designer,CODE)软件设计了一种由掺钨(Tungsten-doped,W-doped)二氧化钒(Vanadium dioxide,VO2)层和二氧化硅(Silicon dioxide,SiO2)减反层组成的高性能智能窗膜系。系统研究了各层膜的厚度对红外调节率和可见光透过率的影响,确定综合性能优良的膜系为玻璃/70nm掺钨二氧化钒/50nm二氧化硅,并采用大面积多靶磁控溅射系统制备出了该膜系。实验测得膜系的相变温度为38.2℃,红外调节率(2400 nm波长处)为40.4%,可见光的峰值透过率为46.3%。在太阳能红外波段,膜系具有良好的入射调节效果。此外,该膜系的制备方法与现有的大面积镀膜玻璃工艺兼容,适于工业化生产。

Development of High-performance Tungsten-doped Vanadium Dioxide Layer Stack for Smart Window

According to the practical requirements of the phase transition temperature close to room temperature, the good infrared transmission adjustment ability and high visible light transmittance of the VO2 layer stacks for smart windows, a high performance smart window layer stack composed of a tungsten-doped VO2 layer and a SiO2 antireflection layer is designed by using a CODE （Coating designer） software. The infuence of the thickness of each layer on its infrared transmission adjustment ability and visible light transmittance is studied systematically. The layer stack composed of glass/70 nm tungsten- doped VO2/50 nm SiO2 is found to have the best comprehensive performance. It is prepared by using a large area magnetron sputtering system. The experimental measurement result shows that it has a phase transition temperature of 38.2 ℃, an infrared transmission adjustment ability of 40.4% and a peak visible light transmittance of 46.3%. In the infrared band of sunlight, it has good incident radiation adjustment effectiveness. Moreover, the preparation method of the layer stack is compatible to the current large area glass coating process. So, it is suitable for industrial production.