Low Temperature Performance of Miniature Capacitive Pressure Sensor with Submicron Gap |
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| Authors: | M Hieda T Kato D Hirano T Matsushita N Wada |
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| Affiliation: | (1) Department of Physics, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8602, Japan |
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| Abstract: | No Heading Recent development of micromachining techniques enables us to make tiny sensors, which are tempting for use in low temperature studies. We tested a miniature capacitive pressure sensor which was designed specially for a commercial sphygmomanometer, and report the low temperature performance. This sensor can distinguish a change of 0.05 Pa in the pressure of helium vapor estimated from a long term stability at 4.0 K. This type of miniature pressure sensor should be useful as a research tool at cryogenic temperatures.PACS numbers: 07.07.Df, 07.20.Mc |
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