利用复振幅滤波器实现激光作用区温度均匀化的理论分析

理应用连续激光诱导金属膜或氧化膜层的过程中，由于激光焦斑光强呈高斯分布，致使材料表面激光作用区温度场分布成类高斯型，梦或的馥膜厚度正均匀、金属导线加宽，故直接利用高斯光束不能满足激光诱导技术对光束作用区温度均匀性的要求。文中利用复振幅滤波器对人射高斯光束的振幅和相位进行调制实现作用区光场均匀化的结果，模拟了在材料表面产生的温度分布。模拟结果显示，高斯光束通过复振幅滤波器后，光束作用区内温度场的分布均匀性良好，并且光斑半径范围内外温差显著，可以满足诱导技术对光束质量的要求。

Theory study of using a complex filter for temperature uniform in laser distribution region

Laser induced liquid-phase technique has been widely used to achieve metal films or oxide films on the surface of the semiconductor materials,due to the intensity distribution of the incident laser beam is Gaussian,and the temperature distribution on the surface is like the Gaussian,thickness of the films induced by this technique are asymmetry,and the metal wires widening.So Gaussian beam can't satisfy the needs of laser induced technique.In this paper,we use the result of which a complex filter convert a Gaussian beam into a uniform distribution beam,and simulate the temperature distribution of that physical model,and then we get an ideal uniform distribution of temperature on the surface,that beam converted by Gaussian laser can be applied to laser induced technique.