| 晶片氧化工艺高温炉动态温度巡踪仪设计 |
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| 引用本文： | 朱品昌,李传江,倪继锋.晶片氧化工艺高温炉动态温度巡踪仪设计[J].机械与电子,2007(11):28-30. |
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| 作者姓名： | 朱品昌 李传江 倪继锋 |
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| 作者单位： | 上海师范大学机械与电子工程学院,上海,201418 |
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| 摘 要： | 传统温差热电偶温度测控,存在着高温炉内温度均匀度差和动态温度一致性差,达不到高精度温度测控要求的问题,运用DS18820单线数字温度传感器与AT89C2051单片机设计的高温炉动态温度巡踪仪,能实时精确监控高温炉内单点或多点的温度值,给出了功能电路及程序流程,并作了实测结果分析.
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| 关 键 词： | DS18B20单线数字温度传感器 热风循环高温炉 动态温度检测 温差热电偶 晶片 氧化工艺 高温炉 动态温度 设计 Tracker Temperature 结果分析 程序流程 功能电路 温度值 监控 单片机 单线数字温度传感器 运用 问题 精度 一致性 温度均匀度 存在 |
| 文章编号： | 1001-2257（2007）11-0028-03 |
| 修稿时间： | 2007-05-29 |
The Dynamic Temperature Tracker in High-temperature Oven |
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| ZHU Pin-chang,LI Chuan-jiang,NI Ji-feng.The Dynamic Temperature Tracker in High-temperature Oven[J].Machinery & Electronics,2007(11):28-30. |
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| Authors: | ZHU Pin-chang LI Chuan-jiang NI Ji-feng |
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| Affiliation: | College of Mechanical and Electronic Engineering,Shanghai Normal University,Shanghai 201418,China |
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| Abstract: | The traditional thermocouple of temperature has the shortcoming in unity properties.So the result was not very precise.By DS18B20(uniline digital temperature sensor) and AT89C2051,a dynamic temperature tracker was designed which can track temperature precisely of many places in the baker on real time.The circuit and the program is provided,at last the analysis of the test results is made in detail. |
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| Keywords: | uniline digital temperature sensor(DS18B20) baking oven with heated air circulation dynamic humidity test thermocouple of temperature different |
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