纳米SiC颗粒SAXS表征及其与 XRD、SEM的比较

对在不同工艺下制备的两组纳米SiC颗粒分别进行了小角X射线散射(SAXS)、X射线衍射(XRD)和扫描电镜(SEM)测试．结果显示，两组颗粒试样存在尺寸和粒度分布差异，不同测量方法所包含的信息各有侧重．利用二维探测器XRD系统进行了SAXS和XRD测量，探讨了该系统在SAXS测量中的数据采集和处理方法，对这些测试结果及其与SEM的结果进行了综合分析比较．发现SAXS更适合于样品尺寸的总体状态表征。能提供更丰富的信息，计算结果更可靠．

Characterization of Nano-Particle SiC by SAXS and Its Comparison with XRD,SEM

Two groups of nano-particle SiC prepared from different methods were examined with X-ray diffraction(XRD), small angle X-ray scattering(SAXS) and scanning electron microscope(SEM). From the testing results, the particle sizes and its distributions are different between those two groups of samples. Furthermore, the particle sizes for either group of samples are not the same obtained from different measuring methods. With two-dimensional XRD system, XRD and SAXS were carried out and the data processing methods on SAXS were discussed. By comparing XRD,SAXS and SEM results, it is found that different measuring methods reflect different aspects of particles information. SAXS is the best method in the current case, and it can give much information about nano-particles and more reliable calculation results.