| 准分子激光加工PMMA生物芯片片基的实验研究 |
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| 引用本文： | 钱晓峰,陈涛,郭商勇.准分子激光加工PMMA生物芯片片基的实验研究[J].微纳电子技术,2006,43(1):47-49,54. |
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| 作者姓名： | 钱晓峰 陈涛 郭商勇 |
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| 作者单位： | 北京工业大学激光工程研究院,北京,100022 |
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| 基金项目： | 国家高技术研究发展计划(863计划)，北京市自然科学基金 |
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| 摘 要： | 用准分子激光对高聚物材料进行微加工制作,可以得到比较理想的高聚物基生物芯片。采用248nm的KrF准分子激光器对PMMA(聚甲基丙烯酸甲酯)进行微细加工,探讨了准分子激光与PMMA相互作用的机理。进行了表面微通道制作和打孔实验,研究激光加工的工艺参数及加工质量的变化规律。结果表明,准分子激光蚀刻完全适合生物芯片的制作,而且加工过程简单,是一种行之有效的制作方法。
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| 关 键 词： | 生物芯片 准分子激光 蚀刻 微加工 |
| 文章编号： | 1671-4776（2006）01-0047-03 |
| 收稿时间： | 2005-08-31 |
| 修稿时间： | 2005-08-31 |
Study on Ablation of PMMA Based Biochip by Excimer Laser |
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| QIAN Xiao-feng,CHEN Tao,GUO Shang-yong.Study on Ablation of PMMA Based Biochip by Excimer Laser[J].Micronanoelectronic Technology,2006,43(1):47-49,54. |
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| Authors: | QIAN Xiao-feng CHEN Tao GUO Shang-yong |
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| Affiliation: | College of Laser Engineering, Beijing University of Technology, Beijing 100022, China |
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| Abstract: | Using excimer laser to manufacture polymer materials can get more ideal biochips.. The reciprocal mechanism of excimer ablation and the PMMA material were studied by using the KrF excimer with wavelength of 248 nm. On the surface of PMMA, pores and micro-channels were fabricated and the rules of technics parameters of excimer laser and machining quality were disscussed. The excimer laser ablation is suitable for fabrication of hiochip and its process is simple. |
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| Keywords: | biochip excimer laser ablation microfabrication |
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