| 实用化XeCl准分子激光器气体寿命的实验研究 |
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| 引用本文： | 方晓东,戴静华.实用化XeCl准分子激光器气体寿命的实验研究[J].激光技术,1996,20(1):50-52. |
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| 作者姓名： | 方晓东 戴静华 |
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| 作者单位： | 1.中科院安徽光机所, 合肥, 230031; |
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| 摘 要： | 气体寿命是影响准分子激光器输出稳定的一个重要因素.我们在一台实用化XeCl准分子激光器上实验,定量给出了微量补充HCl气体对激光输出的影响,并且给出了激光气体长时间的工作寿命曲线.
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| 关 键 词： | XeCl准分子激光器 气体寿命 |
| 收稿时间： | 1994-10-11 |
Experimental study on gas lifetime of XeCl excimer laser |
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| Fang Xiaodong.Experimental study on gas lifetime of XeCl excimer laser[J].Laser Technology,1996,20(1):50-52. |
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| Authors: | Fang Xiaodong |
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| Abstract: | Gas life is an important factor for operation of excimer laser. The gas lifetime of the XeClexcimer laser is mainly dependent on the ingredient of halogen gas and the actinic absorption. In experimental study, HCI gas was added when laser output reduced to 70%. Filially, the relationship of laseroutput and HCI additive was obtained. The experimental results show that the gas lifetime can be prolonged with the HCI gas additivc. |
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| Keywords: | XeCl excimer laser gas lifetime |
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