| 微型磁通门工艺的研究 |
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| 引用本文： | 游余新,王东红,陈伟平,王蔚,兰慕杰,王喜莲,于杰.微型磁通门工艺的研究[J].哈尔滨工业大学学报,2003,35(3):381-384. |
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| 作者姓名： | 游余新 王东红 陈伟平 王蔚 兰慕杰 王喜莲 于杰 |
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| 作者单位： | 1. 哈尔滨工业大学,MEMS中心,黑龙江,哈尔滨,150001
2. 哈尔滨工业大学,测试中心,黑龙江,哈尔滨,150001 |
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| 摘 要： | 为了制备体积小重量轻的可用于航天方面的微型磁传感器，用微机械加工方法制备了微型磁通门芯片。重点研究用蒸镀和掩膜电铸两种途径制备微型磁门磁芯的工艺，研究了不同电铸工艺参数（镀液中cFe^2 ）／c（Ni^2＋）比、电流密度、pH值）对镀层组份的影响并获得较为理想的成分比。利用振动样品磁强计测得磁芯材料的磁滞回线表明电镀的磁芯性能优于蒸镀的。
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| 关 键 词： | MEMS 微型磁通门 真空镀膜 掩膜电铸 |
| 文章编号： | 0367-6234(2003)03-0381-04 |
| 修稿时间： | 2001年3月1日 |
Research for technology of micro magnetic fluxgate |
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| YOU Yu xin ,WANG Dong hong ,CHEN Wei ping ,WANG Wei ,LAN Mu jie ,WANG Xi lian ,YU Jie.Research for technology of micro magnetic fluxgate[J].Journal of Harbin Institute of Technology,2003,35(3):381-384. |
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| Authors: | YOU Yu xin WANG Dong hong CHEN Wei ping WANG Wei LAN Mu jie WANG Xi lian YU Jie |
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| Affiliation: | YOU Yu xin 1,WANG Dong hong 1,CHEN Wei ping 1,WANG Wei 1,LAN Mu jie 1,WANG Xi lian 1,YU Jie 2 |
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| Abstract: | In order to get magnetic sensor with micro volume and weight used in spaceflight, the micro-magnetic fluxgate has been fabricated by micromachining .The evaporating and plating technology of fabrication magnetic core has been mainly researched. Influences of some parameters (the rate of CFe 2+ /CNi 2+ , current density and pH) on component of plating magnetic core (NiFe) have been tested and perfect component was gained. From two hysteresis loops it can be seen that magnetic core characteristic is good by plating than evaporation. |
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| Keywords: | MEMS micro magnetic fluxgate evaporation plating |
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