| 一种电容间隙精确可控的高对称加速度传感器 |
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| 引用本文： | 毛健,车录锋,林友玲,李玉芳,周晓峰,熊斌,王跃林.一种电容间隙精确可控的高对称加速度传感器[J].固体电子学研究与进展,2009,29(1). |
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| 作者姓名： | 毛健 车录锋 林友玲 李玉芳 周晓峰 熊斌 王跃林 |
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| 作者单位： | 1. 中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海,200050;中国科学院研究生院,北京,100039
2. 中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海,200050 |
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| 基金项目： | 国家高技术研究发展计划(863计划)，YY项目 |
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| 摘 要： | 提出了一种高对称电容式微加速度传感器,该传感器为硅四层键合三明治结构,在完成传感器整体结构制作的同时,实现了圆片级真空封装。利用多次氧化的方法,既精确控制了加速度传感器的初始电容间距,又实现了限位凸点的制作。该加速度传感器的谐振频率为657Hz,品质因子为198,灵敏度为0.59V/g。
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| 关 键 词： | 电容式加速度传感器 硅硅键合 圆片级真空封装 电容间隙控制 |
A Fully Symmetrical Capacitive Accelerometer with Precisely Controllable Capacitor Gap |
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| MAO Jian,CHE Lufeng,LIN Youling,LI Yufang,ZHOU Xiaofeng,XIONG Bin,WANG Yuelin.A Fully Symmetrical Capacitive Accelerometer with Precisely Controllable Capacitor Gap[J].Research & Progress of Solid State Electronics,2009,29(1). |
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| Authors: | MAO Jian CHE Lufeng LIN Youling LI Yufang ZHOU Xiaofeng XIONG Bin WANG Yuelin |
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| Affiliation: | 1 State Key Laboratory of Transducer Technology;Shanghai Institute of Microsystem and Information Technology;Chinese Academy of Sciences;Shanghai;200050;CHN;2Graduate University of Chinese Academy of Sciences;Beijing;100039;CHN |
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| Abstract: | This paper presents a fully symmetrical capacitive accelerometer. The sensor is a sandwich structure which is fabricated by silicon four-layer bonding and packaged at wafer-level in a vacuum. The precisely controllable original capacitor gap and the bumpers of the sensor are formed by multi-oxidation. The fabricated accelerometer has the sensitivity of 0.59 V/g,the resonance frequency of 657 Hz and the quality factor of 198. |
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| Keywords: | capacitive accelerometer silicon-silicon bonding wafer-level vacuum package capacitor gap control |
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