| MOS力敏运算放大器 |
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| 引用本文： | 岳瑞峰,刘理天,李志坚.MOS力敏运算放大器[J].电子学报,2001,29(8):1032-1034. |
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| 作者姓名： | 岳瑞峰 刘理天 李志坚 |
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| 作者单位： | 清华大学微电子学研究所,北京 100084 |
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| 摘 要： | 利用MOSFET的压阻效应,本文提出了力敏运算放大器的概念、基本原理和设计思想.作为其应用之一,研制出一种新型集成压力传感器——集成MOS力敏运放压力传感器.这种压力传感器具有很高的压力响应灵敏度,可望在诸多领域有广泛应用.
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| 关 键 词： | 力敏运算放大器 压阻效应 集成压力传感器 |
| 文章编号： | 0372-2112(2001)08-1032-03 |
| 收稿时间： | 2000-07-12 |
Stress-Sensitive MOS OPerational amplifier |
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| YUE Rui-feng,LIU Li-tian,LI Zhi-jian.Stress-Sensitive MOS OPerational amplifier[J].Acta Electronica Sinica,2001,29(8):1032-1034. |
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| Authors: | YUE Rui-feng LIU Li-tian LI Zhi-jian |
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| Affiliation: | Institute of Microelectronics,Tsinghua University,Beijing 100084,China |
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| Abstract: | The concept,fundamental and design methodology of stress-sensitive operational amplifier are proposed on the basis of piezoresistive effect of MOS field-effect transistor.As one of its applications,a novel integrated pressure sensor with stress-sensitive MOS operational amplifier is designed and fabricated.This kind of pressure sensor is of very high pressure sensitivity and promising to achieve widespread application in many fields. |
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| Keywords: | stress-sensitive operational amplifier piezoresistive effect integrated pressure sensor |
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