| 高精度模糊自整定温度控制系统研究 |
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| 引用本文： | 李金涛,颜向乙,尚美杰,张继静.高精度模糊自整定温度控制系统研究[J].电子工业专用设备,2011,40(12):34-37. |
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| 作者姓名： | 李金涛 颜向乙 尚美杰 张继静 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所,北京,101601 |
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| 摘 要： | 针对半导体专用设备对温度的特殊要求,采用了一种基于模糊算法、对加热对象适应能力较强的变参数温度控制系统,通过在某半导体专用设备中使用考核,该控制系统控制精度、对控制对象的适应能力、抗冲击能力以及稳定性得到了很好地验证。
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| 关 键 词： | 半导体设备 温度控制 高精度 模糊自整定 自学习 |
High Precision Temperature Control System Base On Fuzzy And Changing Parameter Arithmetic |
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| Li Jintao Yan Xiangyi Shang Meijie Zhang Jijing.High Precision Temperature Control System Base On Fuzzy And Changing Parameter Arithmetic[J].Equipment for Electronic Products Marufacturing,2011,40(12):34-37. |
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| Authors: | Li Jintao Yan Xiangyi Shang Meijie Zhang Jijing |
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| Affiliation: | Li Jintao Yan Xiangyi Shang Meijie Zhang Jijing (The 45th Research Institute Of CETC,Beijing 101601,China) |
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| Abstract: | In this paper,to respond the high requirement of temperature in semiconductor manufacturing,invented a temperature control system,base on Fuzzy algorithm,which has superior ability to adapt the significant changes in the control objects.Through the validation on the devices for semiconductor manufacturing and processing,the control precision,the ability to adapt to the control objects,the impact resistance and the stability of this control system have been verified. |
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| Keywords: | semiconductor device Temperature control High precision Fuzzy Auto-study |
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