| MEMS半填充气相色谱柱研究 |
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| 引用本文： | 李臆,杜晓松,高超,蒋亚东,齐虹,王永刚.MEMS半填充气相色谱柱研究[J].传感器与微系统,2014,33(9):32-34. |
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| 作者姓名： | 李臆 杜晓松 高超 蒋亚东 齐虹 王永刚 |
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| 作者单位： | 1. 电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室,四川成都,610054
2. 中国电子科技集团公司第四十九研究所,黑龙江哈尔滨,150001 |
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| 基金项目： | 国家自然科学基金资助项目，国家高技术研究发展“863”计划资助项目 |
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| 摘 要： | 采用MEMS技术设计了一种微型半填充气相色谱柱,运用深反应离子刻蚀(DRIE)技术,对器件刻蚀深250μm,其微型色谱柱总长度为1m,宽度为160μm,槽道内部填充20μm×20μm微型柱。采用静态涂覆法对色谱柱涂覆SE—54固定相。通过理论模拟分析柱结构,得出微型半填充色谱柱具有高分离效率能力。在对酯类化合物分离测试中,选取了含酯类的化学战剂模拟剂和几种酯类食品添加剂,分别对其进行分离,所有组分在75s内被完全分离。实现了微型半填充色谱柱快速并具有高分离率。
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| 关 键 词： | 微型气相半填充色谱柱 分离效率 快速分离 微机电系统 |
Research of MEMS-based semi-packed gas chromatography column |
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| LI Yi,DU Xiao-song,GAO Chao,JIANG Ya-dong,QI Hong,WANG Yong-gang.Research of MEMS-based semi-packed gas chromatography column[J].Transducer and Microsystem Technology,2014,33(9):32-34. |
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| Authors: | LI Yi DU Xiao-song GAO Chao JIANG Ya-dong QI Hong WANG Yong-gang |
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| Affiliation: | LI Yi, DU Xlao-song , GAO Chao, JIANG Ya-dong , QI Hong , WANG Yong-gang( 1. State Key Laboratory of Electronic Thin Film and Integrated Devices, School of Optoeleetronie Information, University of Electronic Science and Technology of China, Chengdu 610054, China; 2. The 49th Research Institute, China Electronics Technology Group Corporation, Harbin 150001, China) |
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| Abstract: | A kind of semi-packed gas chromatography （GC） column is fabricated based on micro-electro- mechanical system （MEMS） technique, by using deep reactive ion etching （DRIE） technology to fabricate 250 μm- deep,lm long and 160 μm wide, filling with 20 μm × 20 μm micro column in channel to form semi-packed GC column. SE-54 is coated on column by static coating method as stationary phase. Through theoretically simulating and analyzing column structure, it shows semi-packed GC column has high seperation efficiency. In separation, choose chemical warfare agents （CWA） simulants and food additives, which contains ester to separate respectively, all samples are separated and test on ester components completely in 75 s. The result shows that the column achieves both fast speed and high separation rate. |
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| Keywords: | MEMS semi-packed gas chromatography (GC) column separation efficiency fast separation MEMS |
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