| 利用三光束激光干涉仪评估纳米平台的移动性能 |
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| 引用本文： | 王世华,陈秀玲,徐淦.利用三光束激光干涉仪评估纳米平台的移动性能[J].光学精密工程,2011,19(9):2284-2292. |
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| 作者姓名： | 王世华 陈秀玲 徐淦 |
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| 作者单位： | 国家计量中心新加坡科技研究局,新加坡,118221 |
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| 基金项目： | Nanometrology Roadmap Funded by Ministry of Industry and Trade in Singapore |
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| 摘 要： | 纳米位移传感器多集成在纳米平台的平行移动柔性机构中,通过闭环控制回路来实现纳米级的平台移动精度,本文介绍了利用具有亚纳米分辨率的三光束单频激光干涉仪校正纳米级电容式线性移动平台位移的工作,阐述了校正测试系统的布局以及线位移和角度位移的校正测试原理.通过实验成功地对移动线位移320 μm的纳米平台进行了校正,实验数据表明...
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| 关 键 词： | 电容式纳米平台 纳米位移传感器 激光干涉仪 |
Evaluation of nano-stage movement by using triple-beam laser interferometer |
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| WANG Shi-hua,TAN Siew-leng,XU Gan.Evaluation of nano-stage movement by using triple-beam laser interferometer[J].Optics and Precision Engineering,2011,19(9):2284-2292. |
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| Authors: | WANG Shi-hua TAN Siew-leng XU Gan |
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| Affiliation: | WANG Shi-hua*,TAN Siew-leng,XU Gan (National Metrology Centre,Agency for Science,Technology and Research,Singapore 118221) |
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| Abstract: | Nanosensors are generally integrated into flexure translation stages to form a closed-loop feedback to control the movement of the stage accurately in a nano-scale order.To evaluate the displacement of nano-stages,a calibration system based on a single frequency triple-beam laser homodyne interferometer with a sub-nanometre resolution was developed to calibrate the precision of the linear nano-stage with a capacitive feedback sensor.The triple-beam configuration and its linear and angular measuring principl... |
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| Keywords: | capacitive nano-stage nanosensor laser interferometer |
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