| 光学非球面检测平台伺服控制系统研究 |
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| 引用本文： | 郭隐彪,杨平,刘建春.光学非球面检测平台伺服控制系统研究[J].中国机械工程,2007,18(14):1639-1643. |
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| 作者姓名： | 郭隐彪 杨平 刘建春 |
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| 作者单位： | 1. 厦门大学,厦门,361005
2. 厦门理工学院,厦门,361005 |
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| 基金项目： | 国家高技术研究发展计划(863计划);厦门大学校科研和教改项目 |
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| 摘 要： | 根据高精度非球面表面检测的要求，设计了一种用于微纳精度测量的光学非球面检测平台伺服控制系统。系统基于DSP芯片控制技术，采用Ti公司生产的TMS320F2812芯片为运动控制电路的核心；基于Windows操作平台和CCS2．0集成开发工具进行软件开发。系统设计的目的是实现平台的多轴运动控制及伺服运动控制系统的软硬件模块的扩展。通过试验和运动仿真对系统的稳定性和精度进行了分析，分析结果表明系统达到了较高的定位控制精度。
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| 关 键 词： | 非球面 检测 伺服电机 运动控制 |
| 文章编号： | 1004-132X（2007）14-1639-05 |
| 修稿时间： | 2006-03-06 |
Study on Servo Control System of Measurement Platform for Optical Aspheric Surfaces |
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| Guo Yinbiao,Yang Ping,Liu Jianchun.Study on Servo Control System of Measurement Platform for Optical Aspheric Surfaces[J].China Mechanical Engineering,2007,18(14):1639-1643. |
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| Authors: | Guo Yinbiao Yang Ping Liu Jianchun |
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| Affiliation: | 1. Xiamen University, Xiamen, Fujian, 361005 ; 2. Xiamen University of Technology, Xiamen, Fujian, 361005 |
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| Abstract: | According to the requirements of high precision measurement of aspheric surfaces, a servo control system which was used for the micro--nanometer accuracy measurement platform for optical aspheric surfaces was established. The system was based on the control technology of high performance DSP chip. The chip,TMS320F2812 produced by Ti Company,was as the core of motion control circuit. Under Windows operating system and CCS2.0, the software development was accomplished. The system was designed to achieve multi--axis motion control and to expand the hardware and software module for the servo motion control part. The stability and accuracy of the system was analyzed separately by simulation and experiment. The results show that the system has better performance in positioning control. |
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| Keywords: | DSP |
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