|
|||||
|
|
Plasma-Etching Enhanced Mechanical Polishing for CVD Diamond Films |
|
| Affiliation: | [1]Province Key Lab of Plasma Chemistry and Advanced Materials, Wuhan Institute of Technology, Wuhan 430073, China; [2]Department of Physics, Huazhong University of Science and Technology, Wuhan 430073, China |
| Abstract: | diamond film, plasma etching, polishing, oxygen plasma |
| Keywords: | diamond film plasma etching polishing oxygen plasma |
| 本文献已被 维普 等数据库收录！ | |
