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SiC Formation Through Interface Reaction between C60 and Si in Plasma Environment |
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| Authors: | DING Fang MENG Liang ZHU Xiaodong |
| Affiliation: | CAS Key Laboratory of Basic Plasma Physics, Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China |
| Abstract: | SiC, interface reaction, C60 plasma |
| Keywords: | SiC interface reaction C60 plasma |
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