| 基于MSM结构的表面等离子体共振光纤折射率传感器 |
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| 引用本文： | 郭志勇,葛益娴,沈令闻,张鹏,顾钦顺.基于MSM结构的表面等离子体共振光纤折射率传感器[J].半导体光电,2020,41(2):205-210. |
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| 作者姓名： | 郭志勇 葛益娴 沈令闻 张鹏 顾钦顺 |
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| 作者单位： | 南京信息工程大学 电子与信息工程学院, 南京 210044;南京信息工程大学 电子与信息工程学院, 南京 210044;江苏省大气环境与装备技术协同创新中心, 南京 210044 |
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| 基金项目： | 国家自然科学基金项目(61307061)；江苏高校优势学科Ⅲ期建设工程资助项目. |
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| 摘 要： | 基于表面等离子体共振(SPR)效应,设计了一种基于多模-单模-多模(MSM)结构的光纤折射率传感器。采用光纤熔接的方式构成MSM结构,并且在单模光纤的表面涂覆二氧化钛/银(TiO2/Ag)复合膜构成传感单元。利用FDTD Solutions仿真分析了单模光纤长度与金属膜厚度对传感器性能的影响。结果表明:单模光纤长度越长,共振深度越深;TiO2/Ag复合膜中Ag膜厚度为50nm,TiO2膜厚度为20nm时,传感器性能最优,在1.33~1.41环境折射率范围内,传感器的灵敏度约为6 875nm/RIU。实验结果表明该光纤折射率传感器结构制作工艺简单、灵敏度高。
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| 关 键 词： | 光纤传感器 表面等离子体共振 MSM结构 折射率 复合膜 |
| 收稿时间： | 2019/10/10 0:00:00 |
Surface Plasmon Resonance Fiber Refractive Index Sensor Based on MSM Structure |
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| GUO Zhiyong,GE Yixian,SHEN Lingwen,ZHANG Peng,GU Qinshun.Surface Plasmon Resonance Fiber Refractive Index Sensor Based on MSM Structure[J].Semiconductor Optoelectronics,2020,41(2):205-210. |
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| Authors: | GUO Zhiyong GE Yixian SHEN Lingwen ZHANG Peng GU Qinshun |
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| Affiliation: | School of Electronics & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, CHN;School of Electronics & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, CHN;Jiangsu Collaborative Innovation Center of Atmospheric Environment and Equipment Technology, Nanjing 210044, CHN |
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| Abstract: | Based on the surface plasmon resonance (SPR) effect, a fiber-optic refractive index sensor based on a multimode-singlemode-multimode (MSM) structure was designed. The structure of the MSM is constructed by optical fiber fusion, and the surface of the single-mode optical fiber is coated with a titanium dioxide/silver (TiO2/Ag) composite film to form a sensing unit. The effects of single-mode fiber length and metal film thickness on sensor performance were analyzed using FDTD Solutions. The results show that the longer the single-mode fiber length, the deeper the resonance depth; when the thickness of the Ag film is 50nm, and the thickness of the TiO2 film is 20nm, the sensor can obtain the best performance. In the range of 1.33~1.41 ambient refractive index, the sensor has a sensitivity of approximately 6875nm/RIU. Experimental results show that the optical fiber refractive index sensor has a simple manufacturing process and high sensitivity. |
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| Keywords: | optical fiber sensor SPR MSM structure refractive index composite membrane |
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