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Monolithic Integration of Diffractive Microlens Arrays and Infrared Focal Plane Arrays |
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| Authors: | Sihai Chen Xinjian Yi Hongchen Wang Luqin Liu Yingrui Wang |
| Affiliation: | 1. Department of Optoelectronic Engineering, Huazhong University of Science and Technology (HUST), Wuhan, 430074, People's Republic of China 2. The State Key Laboratory for Laser Technology HUST, Wuhan, 430074, People's Republic of China 3. The State Key Laboratory for Imaging Processing and Intelligent Control, HUST, Wuhan, 430074, People's Republic of China 4. The Twenty Fifth Research Institute, Spaceflight General Corporation, Beijing, 100854, People's Republic of China |
| Abstract: | Monolithic integration method has been demonstrated to increase the fill factor of the infrared focal plane arrays (IRFPA). Which is consists of 256×256 Pt-Si schottky barrier charge coupled devices(CCD) operation in 3-5μm IR region. The relative silicon 256×256 element diffractive microlens arrays have been fabricated on the back side of the substrate of the IRFPA using binary optics technology. The aligning process between IRFPA and microlens arrays on each side of the substrate has been completed by IR mask aligner. The testing results show that the imaging quality is very good and the average optical response of the IR FPA is increased by a factor of 3.0, which is improved by about 25% compared with the hybrid integration method in the previous work. |
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