石英坩埚打磨用金刚石端面铣轮的加工性能研究

石英坩埚,是拉制单晶硅和生产多晶硅铸锭的必要容器。石英坩埚制成后需使用金刚石端面铣轮对其底面进行打磨,目前进口的金刚石端面铣轮使用效果较好,但是价格昂贵,而国内生产的金刚石端面铣轮虽然价格相对便宜,但是质量不高,加工性能不稳定。我公司开发了一种新型生产工艺并制备了金刚石端面铣轮,且进行了金刚石端面铣轮对比打磨石英坩埚试验。结果表明：与采用常规生产工艺制备的金刚石端面铣轮相比,采用新型生产工艺制备的金刚石端面铣轮其使用寿命平均提高45%,且在打磨石英坩埚过程中加工效率比较稳定。

Study of the Processing Performance of Diamond End Milling Wheel Used for Quartz Crucible Grinding

Quartz crucible is a necessary container for monocrystalline silicon drawing and polycrystalline silicon ingot production. After the quartz crucible has been manufactured, the undersurface of it must be grinded by diamond end milling wheel. The quality and processing performance of imported diamond end milling wheel are better than that of the homebred diamond end milling wheel while the price of the imported are much more ex- pensive than that of the homebred. A new production technique has been developed by the author of this article. The diamond end milling wheel of this technique has been manufac- tured and the difference of the grinding performance between it and the other diamond end milling wheels manufactured by conventional technique has been tested. The result shows that the average of the service life of the diamond end milling wheel manufactured by the new technique has been increased by 45%compared to the conventional ones. Besides, the processing effeciency of it during the grinding process is relatively more stable.