| 分离靶电弧离子镀制备TiN/TiAlN多层薄膜的微观结构和力学性能(英文) |
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| 引用本文： | 魏永强,李春伟,巩春志,田修波,杨士勤.分离靶电弧离子镀制备TiN/TiAlN多层薄膜的微观结构和力学性能(英文)[J].中国有色金属学会会刊,2011,21(5):1068-1073. |
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| 作者姓名： | 魏永强 李春伟 巩春志 田修波 杨士勤 |
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| 作者单位： | 哈尔滨工业大学先进焊接与连接国家重点实验室,哈尔滨,150001 |
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| 基金项目： | Projects (50773015, 10775036) supported by the National Natural Science Foundation of China |
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| 摘 要： | 采用分离靶电弧离子镀制备TiN/TiAlN多层薄膜。为了减少大颗粒的不利影响,利用直线型磁过滤方法来减少低熔点铝靶产生的大颗粒。结果表明,没有过滤的钛靶和磁过滤的铝靶等离子体到达基体的输出量在相同的数量级,同时,采用该方法制备的薄膜中的大颗粒数目是文献中报道的合金靶制备的薄膜大颗粒数目的1/10～1/3。Al元素的添加引起薄膜在(200)晶面的峰值降低,而在(111)和(220)晶面的峰值增强。TiN/TiAlN多层薄膜的最大硬度为HV2495,薄膜的硬度增强符合混合法则,结合力达75 N。
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| 关 键 词： | 电弧离子镀 TiN/TiAlN薄膜 M2高速钢 大颗粒 硬度 双层调制 |
Microstructure and mechanical properties of TiN/TiAlN multilayer coatings deposited by arc ion plating with separate targets |
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| WEI Yong-qiang,LI Chun-wei,GONG Chun-zhi,TIAN Xiu-bo,YANG Shi-qin.Microstructure and mechanical properties of TiN/TiAlN multilayer coatings deposited by arc ion plating with separate targets[J].Transactions of Nonferrous Metals Society of China,2011,21(5):1068-1073. |
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| Authors: | WEI Yong-qiang LI Chun-wei GONG Chun-zhi TIAN Xiu-bo YANG Shi-qin |
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| Affiliation: | WEI Yong-qiang,LI Chun-wei,GONG Chun-zhi,TIAN Xiu-bo,YANG Shi-qin State Key Laboratory of Advanced Welding and Joining,Harbin Institute of Technology,Harbin 150001,China |
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| Abstract: | TiN/TiAlN multilayer coatings were prepared by arc ion plating with separate targets.In order to decrease the unfavorable macroparticles,a straight magnetized filter was used for the low melting aluminium target.The results show that the output plasmas of titanium target without filter and aluminium target with filter reach the substrate with the same order of magnitude.Meanwhile,the number of macroparticles in TiN/TiAlN multilayer coatings deposited with separate targets is only 1/10-1/3 of that deposited ... |
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| Keywords: | arc ion plating TiN/TiAlN coatings M2 high speed steel macroparticles hardness bilayer modulation |
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