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低电调电压全集成10~20GHz VCO的设计与实现
引用本文:高晓强,张加程,王增双,孙高勇.低电调电压全集成10~20GHz VCO的设计与实现[J].半导体技术,2021,46(1):30-35,46.
作者姓名:高晓强  张加程  王增双  孙高勇
作者单位:中国电子科技集团公司第十三研究所,石家庄050051;中国电子科技集团公司第十三研究所,石家庄050051;中国电子科技集团公司第十三研究所,石家庄050051;中国电子科技集团公司第十三研究所,石家庄050051
摘    要:研制了一款低电调电压、多频段压控振荡器(VCO)微波单片集成电路(MMIC),MMIC主要由6频段振荡电路、控制电路、译码电路等组成。将10~20 GHz的频率范围分为6个频段覆盖,从而将电调电压控制在5 V以内。基于GaAs异质结双极晶体管(HBT) 2μm工艺对所设计的VCO进行了流片验证,芯片面积为3.4 mm×3.2 mm。测试结果表明,在室温下,当电源电压为5 V、电调电压在0~5 V时,每个频段VCO可覆盖的频率为9.58~11.6 GHz、11.06~13.23 GHz、12.77~14.89 GHz、14.21~16.48 GHz、16~18.48 GHz和17.7~20.17 GHz;当电调电压为2.5 V、频偏为100 kHz时,每个频段VCO的相位噪声分别为-91.8、-90.5、-90.3、-90、-88.2和-87.1 dBc/Hz。因此,该6频段VCO覆盖了10~20 GHz的频率范围,且每段VCO的相位噪声指标良好,可满足低压电子系统的应用需求。

关 键 词:多频段压控振荡器(VCO)  微波单片集成电路(MMIC)  GaAs异质结双极晶体管(HBT)工艺  控制电路  38译码器

Design and Implementation of 10-20 GHz Low Modulating Voltage Fully Integrated VCO
Gao Xiaoqiang,Zhang Jiacheng,Wang Zengshuang,Sun Gaoyong.Design and Implementation of 10-20 GHz Low Modulating Voltage Fully Integrated VCO[J].Semiconductor Technology,2021,46(1):30-35,46.
Authors:Gao Xiaoqiang  Zhang Jiacheng  Wang Zengshuang  Sun Gaoyong
Affiliation:(The 13th Research Institute,CETC,Shijiazhuang 050051,China)
Abstract:A low modulating voltage,multi-band voltage controlled oscillator(VCO)monolithic microwave integrated circuit(MMIC)was developed.The MMIC was mainly composed of 6-band oscillation circuit,control circuit and decoding circuit.The frequency range of 10-20 GHz was divided into 6-band,so as to control the modulating voltage within 5 V.Based on GaAs heterojunction bipolar transistor(HBT)2μm technology,the designed VCO was verified by the wafer processing,and the chip area was 3.4 mm×3.2 mm.The test results show that at room temperature,when the power supply voltage is 5 V and the modulating voltage is in the range of 0-5 V,the frequencies of each band are 9.58-11.6 GHz,11.06-13.23 GHz,12.77-14.89 GHz,14.21-16.48 GHz,16-18.48 GHz and 17.7-20.17 GHz,respectively.When the modulating voltage is 2.5 V and the frequency offset is 100 kHz,the phase noises of the VCO in each band are-91.8,-90.5,-90.3,-90,-88.2 and-87.1 dBc/Hz,respectively.Therefore,the 6-band VCO covers the frequency range of 10-20 GHz,and the phase noise index of each band is good,which can meet the application requirements of the low voltage electronic system.
Keywords:multi-band voltage controlled oscillator(VCO)  monolithic microwave integrated circuit(MMIC)  GaAs heterojunction bipolar transistor(HBT)process  control circuit  38 decoder
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