| 微/纳米CVD金刚石涂层的制备 |
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| 引用本文： | 张旭辉,左敦稳,徐锋,庆振华,黄美健,郑琳.微/纳米CVD金刚石涂层的制备[J].机械制造与自动化,2012,41(3):34-36,48. |
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| 作者姓名： | 张旭辉 左敦稳 徐锋 庆振华 黄美健 郑琳 |
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| 作者单位： | 南京航空航天大学 抗疲劳制造与表面工程研究所,江苏南京,210016 |
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| 基金项目： | 国家自然科学基金，南京航空航天大学2010年度研究生创新基金 |
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| 摘 要： | 使用热丝化学气相沉积(HFCVD)装置,在以WC - CO硬质合金为衬底,采用调节涂层生长参数,制备出性能优良的微/纳米金刚石涂层.用SEM,AFM,Raman表征微观结构和表面品质.采用压痕法评估涂层的结合性能,并与微米金刚石涂层、纳米金刚石涂层进行比较.结果显示,当生长气压由3.3 kPa降为1.0 kPa时,底层的微米级晶粒逐渐被上层纳米级晶粒覆盖,并且涂层表面显露出纳米金刚石涂层特性.在结合性能实验中也指出,微/纳米金刚石涂层的结合性能比纳米金刚石涂层要优异.
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| 关 键 词： | 热丝化学气相沉积 金刚石涂层 表面粗糙度 |
Synthesis of Micro/Nano-crystalline CVD Diamond Films |
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| ZHANG Xu-hui
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ZUO Dun-wen
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XU Feng
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QING Zhen-hua
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HUANG Mei-jian
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ZHENG Lin.Synthesis of Micro/Nano-crystalline CVD Diamond Films[J].Machine Building & Automation,2012,41(3):34-36,48. |
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| Authors: | ZHANG Xu-hui ZUO Dun-wen XU Feng QING Zhen-hua HUANG Mei-jian ZHENG Lin |
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| Affiliation: | (Institution of Anti-fatigue Manufacturing and Surface Engineering,Nanjing University of Aeronautics & Astronautics,Nanjing 210016,China) |
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| Abstract: | High performance micro/nano-crystalline diamond films are deposited on Co-cemented carbide substrates using hot filament chemical vapor deposition(HFCVD) technique and controlling deposition parameters.The surface morphology and microstructure of the micro/nano-crystalline diamond films are analyzed by using SEM,AFM and Raman spectrometry.Adhesion performance of micro/nano-crystalline diamond films is evaluated by indentation method,and the performance of micro-crystalline diamond films is compared with that of nano-crystalline diamond films.The results show that the bottom of the diamond films is gradually covered by nano-crystalline diamond,and the surface quality of micro/nano-crystalline diamond films is similar to that of the nano-crystalline diamond films when the reaction pressure drops from 3.3kPa to 1.0kPa.Adhesion performance of micro/nano-crystalline diamond films is better than that of nano-crystalline diamond films. |
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| Keywords: | HFCVD diamond film surface roughness |
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