三维微柱阵列电极的电化学性能(英文)

随着MEMS技术的发展,对微纳尺寸器件的需求日益凸显,微能源的研究变得尤为重要,而微型超级电容器则是其中一种基于电化学电容实现储能的微型能量存储器件.设计了一种基于氧化钌功能薄膜的三维微柱阵列电极,并进行了相关的扫描电镜(SEM)、循环伏安(CV)和交流阻抗谱(EIS)测试.测试表明在2 mm×2 mm的硅片上,直径为50μm、高为100μm的三维微柱阵列电极的比电容为2.43 F/cm2,具有良好的电化学性能.与同容量的二维平面电极相比,基于三维结构的微型超级电容器具有明显的小尺寸优势.

Electrochemical Performance of Three-Dimensional Microelectrode Arrays

With the development of MEMS technology, the worldwide thirst for electric products in mi- croscale has an enormous impact on micro-power. The MEMS super-capacitor is one of the most impor- tant parts for micro-powers. In this paper, RuO2 microelectrode arrays were fabricated and tested by scanning electron microscopy （SEM）, cyclic voltammetry （CV）, and electrochemical impedance spec- troscopy （EIS）. These posts were 50 p,m in diameter and 100 p~m in height, with the foot print area of 2 minx2 ram. The capacitance was 2.43 F/cm2. These 3-D microelectrode arrays exhibited satisfactory electrochemical performance. The performance of micro-super capacitors on 3-D microstructure was shown to offer significant advantages, such as small areal footprint and short diffusion lengths, in comparison with that on 2-D microelectrode.