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Analysis of spring softening effect on the collapse voltage of capacitive MEMS ultrasonic transducers |
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| Authors: | Maity Reshmi Maity N P Guha K Baishya S |
| Affiliation: | 1.Department of Electronics and Communication Engineering, Mizoram University (A Central University), Aizawl, 796 004, India ;2.Department of Electronics and Communication Engineering, National Institute of Technology, Silchar, 788 010, India ; |
| Abstract: | Microsystem Technologies - This paper explained the dependency of collapse voltage on semiconductor device structural features (membrane diameter, membrane thickness and the vertical distance... |
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| 本文献已被 SpringerLink 等数据库收录！ | |
