Tri-Gate Bulk MOSFET Design for CMOS Scaling to the End of the Roadmap |
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| Authors: | Xin Sun Qiang Lu Moroz V Takeuchi H Gebara G Wetzel J Shuji Ikeda Changhwan Shin Tsu-Jae King Liu |
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| Affiliation: | Univ. of California, Berkeley; |
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| Abstract: | A tri-gate bulk MOSFET design utilizing a low-aspect-ratio channel is proposed to provide an evolutionary pathway for CMOS scaling to the end of the roadmap. 3-D device simulations indicate that this design offers the advantages of a multi-gate FET (reduced variability in performance and improved scalability) together with the advantages of a conventional planar MOSFET (low substrate cost and capability for dynamic threshold-voltage control). |
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