多晶高阻长度对多晶电阻方块值的影响

在集成电路中光刻、腐蚀、横向扩散等工艺步骤常会引起电阻阻值的变化,因此在集成电路版图绘制过程中,版图画法对电阻的影响很大。在集成电路设计过程中电阻通常都设计得比较长,容易忽略电阻长度对阻值的影响。当需要将电阻长度设计得较小时,势必要考虑电阻长度对集成电路阻值的影响。在一些不同的工艺中,电阻变短时电阻长度对阻值的影响趋势很可能相反。对比不同工艺中多晶电阻制造的原理,通过流片取得一家工艺厂实际电阻的阻值,分析并比较与其类似的工艺,同时对比另一家工艺厂电阻阻值随长度变化的影响,给出区分多晶电阻长度对阻值影响的判别依据。

A Discuss about How the High Poly Resistor Length Affect Resistor Value

In the integrated circuit, photolithography, etching, and out diffusion will affect the value of resistor. So in the integrated circuit layout design, the layout will affect the value of resistor greatly. As the resistor will be designed very long in the integrated circuit design, the effect of length will be ignored. But sometimes the resistor need be very short, we need consider the effect of resistor length. Sometimes in the different process, the effect of the length is opposite. The principle of making poly resistor is compared in different process. The effect of resistor in different process is discussed too.