| 用于蒙皮外表面空气流测量的MEMS微型压力传感器 |
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| 引用本文： | 陈爽,李晓莹,马炳和,苑伟政.用于蒙皮外表面空气流测量的MEMS微型压力传感器[J].机械科学与技术(西安),2005,24(3):312-314,374. |
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| 作者姓名： | 陈爽 李晓莹 马炳和 苑伟政 |
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| 作者单位： | 西北工业大学微/纳米系统实验室 西安710072
(陈爽，李晓莹，马炳和)，西北工业大学微/纳米系统实验室 西安710072(苑伟政) |
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| 基金项目： | 国家自然基金项目(90305017)，航空科学基金项目(03I53066)，西北工业大学青年创新基金项目资助 |
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| 摘 要： | 为实现飞行器蒙皮外表面空气流的分布式压力检测,设计了基于微机电系统(MEMS)技术的光学压力微型传感器。传感器敏感元件主体结构采用单晶硅的法布里帕罗标准具,并通过光纤与发光二极管和光电探测器等光学元件相连。确定了MEMS微型传感器的关键结构与尺寸,并对压力敏感膜片的变形及反射率等进行了理论计算和行为仿真,结果表明达到预期的设计目标。该传感器具有精度高、抗电磁干扰、尺寸小、耗能低等优点。
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| 关 键 词： | 微机电系统 微型压力传感器 法布里帕罗压力传感器 |
| 文章编号： | 1003-8728(2005)03-0312-03 |
MEMS Pressure Sensor for Aeroskin Surface Aerodynamic Measurement |
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| CHEN Shuang,LI Xiao-ying,MA Bing-he,YUAN Wei-zheng.MEMS Pressure Sensor for Aeroskin Surface Aerodynamic Measurement[J].Mechanical Science and Technology,2005,24(3):312-314,374. |
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| Authors: | CHEN Shuang LI Xiao-ying MA Bing-he YUAN Wei-zheng |
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| Abstract: | According to the pressure measurement requirements of aeroskin, an optical MEMS pressure sensor was designed. Sensor element, which consists of a Fabry-Perot etalon fabricated from single-crystal silicon, connects with the LED and detector by fibers. The sensor′s structure was analyzed and its sensitive deflection of the membrane and its reflectivity was also calculated. Experimental results indicate that this structure meets the design requirements. Finally, finite-element analysis was carried out to simulate the load-deflection behavior of the diaphragm. This sensor has the advantages of high sensitivity, small size, low power and immunity to electro-magnetic interference. |
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| Keywords: | MEMS Micro pressure sensor Fabry-Perot pressure sensor |
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