Effects of poisoning gases on and restoration of PdCuSi metallic glass in a capacitive MEMS hydrogen sensor |
| |
| Affiliation: | 1. Corporate Research & Development Center, Toshiba Corporation, Japan;2. Graduate School of Information, Production and Systems, Waseda University, Japan;1. Renewable Energy Research Center, National Institute of Advanced Industrial Science and Technology (AIST), 2-2-9 Machiikedai, Koriyama, 963-0298, Japan;2. Institute of Technology, Shimizu Corporation, 3-4-17, Etchujima, Koto-ku, Tokyo 135-8530, Japan;1. Center of Excellence for Occupational Health, Occupational Health and Safety Research Center, School of Public Health, Hamadan University of Medical Sciences, Hamadan, Iran;2. Occupational Health and Safety Research Center, Department of Health, Safety, and Environment Management, School of Public Health, Hamadan University of Medical Sciences, Hamadan, Iran;1. School of Materials Science and Engineering, Shanghai Institute of Technology, 100 Haiquan Road, Shanghai, 201418, PR China;2. State Key Laboratory of Advanced Special Steel and School of Materials Science and Engineering, Shanghai University, 99 Shangda Road, Shanghai, 200444, PR China;3. Tube & Pipe Department, Baosteel Research Institute, Baoshan Iron & Steel Co., Ltd, Shanghai, 201900, PR China;1. Department of Chemical Engineering and Biotechnology, National Taipei University of Technology, Taipei, Taiwan;2. Research Center of Energy Conservation for New Generation of Residential, Commercial, and Industrial Sectors, Taipei, Taiwan;3. Graduate Institute of Cancer Biology and Drug Discovery, College of Medical Science and Technology, Taipei Medical University, Taipei, 11031, Taiwan;4. Taipei Cancer Center, Taipei Medical University, Taipei, 11031, Taiwan;5. Cancer Center, Wang-Fan Hospital, Taipei Medical University, Taipei, 11031, Taiwan;6. Traditional Herbal Medicine Research Center of Taipei Medical University Hospital, Taipei Medical University, Taipei, Taiwan;7. TMU Research Center of Cancer Translational Medicine, Taipei Medical University, Taipei, Taiwan;8. Pharmaceutical Research Institute, Albany College of Pharmacy and Health Sciences, Albany, NY, USA;1. Laboratory of Environmental Research on Arid Zones, LIMZA, University of Tarapacá, Chile;2. University of Waterloo, 200 University Avenue West, Waterloo, ON, N2L 3G1, Canada;3. Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, IEMN, UMR CNRS 8520, Avenue Poincaré, CS 60069, 59652, Villeneuve d′Ascq, France;4. Institute of Physics, Facultad de Física, Pontificia Universidad Católica de Chile, Casilla 306, Santiago, Chile;5. Department of Chemical Engineering, Biotechnology and Materials, University of Chile, Beauchef 851, 6th Floor, Santiago, Chile;6. Universidad Autónoma de Nuevo León, Facultad de Ciencias Físico-Matemáticas, Av. Universidad, Cd. Universitaria, San Nicolás de los Garza, NL, Mexico;7. Universidad Autónoma de Nuevo León, Centro de Investigación en Innovación y Desarrollo en Ingeniería y Tecnología, PIIT, Apodaca, NL, Mexico;8. Advanced Materials Laboratory, Department of Mechanical Engineering, University of Chile, Beauchef 851, Santiago, Chile;9. Department of Applied Chemistry, University of Johannesburg, Johannesburg, South Africa;10. Department of Biological Sciences, King Abdulaziz University, Jeddah, 21589, Saudi Arabia |
| |
| Abstract: | We investigated the effects of poisoning and restoration of PdCuSi-metallic glass (MG), which is a sensing material that offers low power consumption and fast response times when used in capacitive MEMS hydrogen sensors. Four poisoning gases were used: hexamethyldisilazane (HMDS), H2S, SO2, and NO2. Exposure to H2S resulted in metal sulfide forming at the surface of the PdCuSi-MG, although the sulfur did not diffuse into the PdCuSi-MG. Exposure to NO2 only resulted in the nitrogen being adsorbed without bonding to metals. The poisoning elements were desorbed by heating. Exposure to H2S and SO2 degraded the hydrogen sensitivity in terms of resistance of the PdCuSi-MG, although exposure to HMDS and NO2 only slowed down the response time. These degradations were recovered by heating. We next examined forming a refresher layer under PdCuSi-MG in a hydrogen sensor. The hydrogen sensitivity of the H2S-exposed hydrogen sensor was restored by performing a refresh operation for a few minutes. |
| |
| Keywords: | Hydrogen sensor PdCuSi Metallic glass Sulfur Poisoning Refresher |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
